November 13 - 16, 2006, Easter Analytical Symposium and Exhibit (EAS), Somerset, NJ

FTIR Analysis of Mixture Composition and Impurity Identification in Semiconductor Process Materials using SIMPLISMA

Steve Hill, Michel Hachey, Michael Boruta

Abstract

Molecular spectroscopy can be challenging for mixture and impurity analysis, although helpful and commonly used in both industry and research settings. For example, it can be difficult to apply in the presence of strongly absorbing interfering species or at low concentration levels. Preliminary work with SIMPLISMA, a multivariate analysis program, shows usefulness in the elucidation of blended polar solution assays and composition of photo resist solids in solution. Essentially, SIMPLISMA helps simplify spectroscopic interpretation by using multivariate algorithms to detect and extract 'pure' components from spectral series of mixtures that are undergoing some concentration changes.
This work shall report the feasibility for detecting the presence of ppm level impurities in strongly absorbing process gases. This technique can provide a means for comprehensive verification of gas impurity certification methods.

Download the presentation in MS PowerPoint (581 Kb ZIP file).
 

Relevant Products: UV-IR Processor, UV-IR Manager, Curve Processor, Curve Manager, SpecManager

Relevant Solutions: Material Science, Failure Analysis